Hydrostatic guide system

Abstract

A hydrostatic guide system including a guide table, a transfer table, a floating amount sensor attached to the transfer table, and a control unit. The transfer table has an inner portion, in which a magnetic attraction unit including a yoke and an electromagnet is embedded, and an outer shell portion, which covers the side surface and the upper surface of the inner portion. After the inner portion houses the yoke and the electromagnet, a gap around the yoke and the electromagnet is filled with a material having appropriate strength, so that the inner portion is integrated with the outer shell portion, and the transfer surface is flattened as whole. A surrounding groove is provided around the transfer table, and pressurized fluid supplied into the groove is jetted out to the guide table.

Dependencies are inferred from the claim text.