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US 2008/0304681 A1Published application
Microphone with Aligned Apertures
AssigneeAnalog Devices, Inc.
InventorsEric Langlois, Thomas Chen, Xin Zhang, Kieran P. Harney
Life of this patent
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Abstract
A MEMS microphone has a backplate with a given backplate aperture, and a diaphragm having a diaphragm aperture. The given backplate aperture is substantially aligned with the diaphragm aperture.
Claims20
A MEMS microphone comprising:
- a backplate having a given backplate aperture;
- and
- a diaphragm having a diaphragm aperture, the given backplate aperture being substantially aligned with the diaphragm aperture.
A MEMS microphone comprising:
- a stationary support;
- a movable diaphragm;
- a plurality of springs movably connecting the diaphragm to the stationary support;
- and
- a backplate spaced from the diaphragm,
- the backplate forming a plurality of backplate apertures, the plurality of backplate apertures including a first backplate aperture,
- the stationary support, diaphragm, and springs forming a plurality of diaphragm apertures, the plurality of diaphragm apertures including a first diaphragm aperture,
- the first diaphragm aperture being at least partially aligned with the first backplate aperture.
5 more elements
A method of forming a MEMS microphone, the method comprising:
- providing a backplate;
- forming a diaphragm spaced from the backplate, the diaphragm forming a diaphragm aperture;
- and
- forming a plurality of backplate apertures, a given aperture of the backplate apertures being at least partially aligned with the diaphragm aperture.
1 more element
Dependencies are inferred from the claim text.