Temperature measuring apparatus and temperature measuring method

A temperature measuring apparatus comprising:

• a light source;
• a splitter for dividing a light beam emanated from the light source into a reference beam and a first to an nth measuring beam;
• a reference beam reflector for reflecting the reference beam coming from the splitter;
• an optical path length adjuster for adjusting an optical path length of the reference beam reflected from the reference beam reflector;
• a reference beam transmitting member for transmitting the reference beam coming from the splitter to a reference beam irradiation position from which the reference beam is irradiated onto the reference beam reflector;
• a first to an nth measuring beam transmitting member for transmitting the first to the nth measuring beam coming from the splitter to measuring beam irradiating positions from which the measurement beams are irradiated onto a first to an nth measurement points of a temperature measurement object;
• and
• a photodetector for measuring an interference between the reference beam reflected from the reference beam reflector and the first to the nth measuring beam reflected from the temperature measurement object,
• wherein the optical path lengths of the first to the nth measuring beam from the splitter to the temperature measurement object are different from each other.

A temperature measuring apparatus comprising:

• a light source;
• a first splitter for dividing a light beam emanated from the light source into a measurement beam and a reference beam;
• at least one second splitter for dividing the measurement beam coming from the first splitter into a first to an nth measuring beam;
• a reference beam reflector for reflecting the reference beam coming from the first splitter;
• an optical path length adjuster for adjusting an optical path length of the reference beam reflected from the reference beam reflector;
• a reference beam transmitting member for transmitting the reference beam coming from the first splitter to a reference beam irradiation position from which the reference beam is irradiated onto the reference beam reflector;
• a first to an nth measuring beam transmitting member for transmitting the first to the nth measuring beam coming from the second splitters to measuring beam irradiating positions from which the measurement beams are irradiated onto a first to an nth measurement points of a temperature measurement object;
• a photodetector for measuring an interference between the reference beam reflected from the reference beam reflector and the first to the nth measuring beam reflected from the temperature measurement object, wherein the optical path lengths of the first to the nth measuring beam from the second splitter to the temperature measurement object are different from each other;
• and
• an AC component extractor that extracts an AC component from an output signal of the photodetector.

A temperature measuring method, comprising:

• irradiating a first to an nth measuring beam whose optical path lengths are different from each other onto respective measurement points of a temperature measurement object while irradiating a reference beam onto a reference beam reflector;
• attenuating the reference beam reflected from the reference beam reflector such that an intensity thereof becomes closer a total intensity of the first to the nth measuring beam by using an attenuator;
• measuring interferences between the attenuated reference beam reflected from the reference beam reflector and the first and the nth measuring beam reflected from the temperature measurement object while moving the reference beam reflector in one direction to thereby change an optical path length of the reference beam reflected from the reference beam reflector;
• and
• measuring temperatures at the respective measurement points of the temperature measurement object based on the results of measuring the interferences.