Intertwined finger capacitors

A capacitive structure comprising:

• a first capacitor arrangement including:
• a first bus having fingers extending therefrom towards a centerline of the capacitive structure;
• and
• a second bus having fingers extending therefrom towards the centerline of the capacitive structure,
• wherein the first bus and the second bus extend substantially parallel to one another, and wherein the fingers of the first bus and the fingers of the second bus are alternately interleaved with one another,
• a second capacitor arrangement including:
• a third bus having fingers extending therefrom towards the centerline of the capacitive structure;
• and
• a fourth bus having fingers extending therefrom towards the centerline of the capacitive structure,
• wherein the third bus and the fourth bus extend substantially parallel to one another, and wherein the fingers of the third bus and the fingers of the fourth bus are alternately interleaved with one another,
• wherein fingers of the first capacitor arrangement are alternately intertwined with fingers of the second capacitor arrangement.

A method for making capacitors, the method comprising:

• forming a plurality of capacitive structures on a substrate, wherein each capacitive structure includes:
• a first conductive finger, and
• a second conductive finger, wherein the first and second conductive fingers are arranged in parallel with each other and separated from each other by a dielectric material and wherein the first finger is connected to a first interconnect and the second conductive finger is connected to a second interconnect,
• forming a first capacitor from a first group of the plurality of capacitive structures having common interconnects;
• forming a second capacitor from a second group of the plurality of capacitive structures having common interconnects;
• and
• intertwining the capacitive structures of the first group with the capacitive structures of the second group.