Optical element, method for producing same, replica substrate configured to form optical element, and method for producing replica substrate
AssigneeSony Corporation
InventorsSohmei Endoh, Tohru Nagai, Kazuya Hayashibe
Life of this patent
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Abstract
An optical element includes a base and many structures arranged at a fine pitch on a surface of the base, each of the structures being in the form of a projection or a depression, in which the structures constitute a plurality of arc tracks, and the structures in every three adjacent rows of the arc tracks are arranged in a tetragonal lattice pattern or a quasi-tetragonal lattice pattern.
Claims10
An optical element comprising:
- a base;
- and
- a plurality of structures arranged at a fine pitch on a surface of the base, each of the structures being in the form of a projection or a depression,
- wherein the structures constitute a plurality of arc tracks, and
- the structures in every three adjacent rows of the arc tracks are arranged in a tetragonal lattice pattern or a quasi-tetragonal lattice pattern.
A replica substrate configured to form an optical element, comprising:
- a base;
- and
- a plurality of structures arranged at a fine pitch on a surface of the base, each of the structures being in the form of a projection or a depression,
- wherein the structures constitute a plurality of arc tracks, and
- the structures in every three adjacent rows of the arc tracks are arranged in a tetragonal lattice pattern or a quasi-tetragonal lattice pattern.
A method for producing a replica substrate configured to form an optical element, the replica substrate including many structures arranged at a fine pitch on a surface of the replica substrate, each of the structures being in the form of a projection or a depression, the method comprising:
- a first step of preparing a substrate including a resist layer on a surface of the substrate;
- a second step of forming latent images at a pitch smaller than the wavelengths of visible light by intermittently irradiating the resist layer with laser light while the laser light is relatively moved in the radial direction of the substrate and while the substrate is rotated;
- a third step of developing the resist layer to form a resist pattern on the surface of the substrate;
- a fourth step of performing etching with the resist pattern as a mask to form an uneven pattern on the surface of the substrate;
- and
- a fifth step of transferring the uneven pattern of the substrate to form a replica substrate,
- wherein in the second step, the latent images in every three adjacent tracks are arranged in a tetragonal lattice pattern or a quasi-tetragonal lattice pattern.
A method for producing an optical element including a plurality of structures arranged at a fine pitch on a surface of the optical element, each of the structures being in the form of a projection or a depression, the method comprising:
- a first step of preparing a substrate including a resist layer on a surface of the substrate;
- a second step of forming latent images at a pitch smaller than the wavelengths of visible light by intermittently irradiating the resist layer with laser light while the laser light is relatively moved in the radial direction of the substrate and while the substrate is rotated;
- a third step of developing the resist layer to form a resist pattern on the surface of the substrate;
- a fourth step of performing etching with the resist pattern as a mask to form an uneven pattern on the surface of the substrate;
- a fifth step of forming a replica substrate of the substrate and forming a metal plating layer on the uneven pattern of the replica substrate;
- a sixth step of detaching the metal plating layer from the replica substrate to form a metal mold having the transferred uneven pattern;
- and
- a seventh step of forming a transparent base with the metal mold, the transparent base having the uneven pattern on a surface of the transparent base,
- wherein in the second step, the latent images in three adjacent tracks are arranged in a tetragonal lattice pattern or a quasi-tetragonal lattice pattern.
Dependencies are inferred from the claim text.