Coordinate measuring machine and method for structured illumination of substrates
AssigneeVistec Semiconductor Systems GmbH
InventorMichael Heiden
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Abstract
A coordinate measuring machine (1) for the structured illumination of substrates is disclosed. The incident light illumination means (14) and/or the transmitted light illumination means (6) have a pupil access via which at least one optical element (35, 88) is positionable in the optical illumination path (4, 5). The size and/or the type and/or the polarization of the pupil illumination may be manipulated such that the structured illumination of the substrate in the coordinate measuring machine (1) corresponds to the structured illumination of this substrate in the exposure process with a stepper.
Claims15
A coordinate measuring machine for a structured illumination of substrates comprising an incident light illumination means and/or a transmitted light illumination means, each defining an optical illumination path, at least one optical element is designed to be positioned at a predetermined location in the optical illumination path, wherein the optical element is designed to manipulate the size and/or the type and/or the polarization of the illumination of a pupil such that the structured illumination of the substrate in the coordinate measuring machine corresponds to the structured illumination of the same substrate in the exposure process with a stepper.
A method for the structured illumination of substrates with an incident light illumination means and/or a transmitted light illumination means, each defining an optical illumination path, comprising the steps of:
- positioning at least one optical element in the optical illumination path;
- and,
- manipulating the size and/or the type and/or the polarization of the illumination of a pupil by the optical element such that the structured illumination of the substrate in the coordinate measuring machine is adapted to the structured illumination of this substrate in the exposure process with a stepper.
Dependencies are inferred from the claim text.