Polarizing device, method for manufacturing the same, liquid crystal device, and projection display device
AssigneeSeiko Epson Corporation
InventorYoshitomo KUMAI
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Abstract
A polarizing device includes: a polarizing device unit composed of a metallic film formed on a base, the metallic film having a plurality of slit-shaped openings; and an etching sacrifice layer provided between the base and the polarizing device unit, so that the etching sacrifice layer is partly etched together with the metallic film during the etching of the polarizing device unit; wherein the etching sacrifice layer is composed of a material that has an etching rate equal to or greater than that of the metallic film.
Claims11
A polarizing device, comprising:
- a polarizing device unit composed of a metallic film formed on a base, the metallic film having a plurality of slit-shaped openings;
- and
- an etching sacrifice layer provided between the base and the polarizing device unit, so that the etching sacrifice layer is partly etched together with the metallic film during the etching of the polarizing device unit, wherein the etching sacrifice layer is composed of a material that has an etching rate equal to or greater than that of the metallic film.
A method for manufacturing a polarizing device having a polarizing device unit composed of a metallic film on a base, the metallic film having a plurality of slit-shaped openings, the method comprising:
- forming an etching sacrifice layer having an etching rate equal to or greater than that of the metallic film on the base;
- and
- forming the metallic film on the etching sacrifice layer, and patterning the metallic film by etching, so as to form the polarizing device unit.
Dependencies are inferred from the claim text.