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US 2008/0303540 A1Published application
Probe card assembly
AssigneeMicronas GmbH
InventorsGunter Stiefvater, Wolfgang Hauser
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Abstract
The invention relates to a probe card assembly comprising a stiffener (1), comprising a PCB (2) disposed in the stiffener (1), and comprising a spider (3) supported by the stiffener and the PCB (2), said spider comprising at least one probe (30) to test a wafer (5). This probe card assembly of the PCB (2) is supported in a loosely decoupled manner in the stiffener (1) to prevent transmission of high thermally-induced warping effects.
Claims10
Probe card assembly for PCB attachment, comprising
- a stiffener (1),
- a PCB (2) disposed in the stiffener (1), and
- a spider (3) supported by the stiffener and the PCB (2) comprising at least one probe (30) for testing a wafer (5), characterized in that
- the PCB (2) is supported in a loosely decoupled manner in the stiffener (1).
1 more element
Dependencies are inferred from the claim text.