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US 2008/0302391 A1Published application
Method For Cleaning Metal Mask
OwnerHirotaka Soneinventor
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Abstract
A method for cleaning a metal mask is disclosed. The method includes washing the metal mask with an organic solvent that dissolves an organic substance adhered to the metal mask, washing, with pure water, the metal mask from which the adhering substance has been removed, and vacuum drying the metal mask that has been washed with the pure water.
Claims6
A method for cleaning a metal mask, comprising:
- washing the metal mask with a solvent that dissolves an adhering substance adhered to the metal mask;
- washing, with pure water, the metal mask from which the adhering substance has been removed;
- and
- vacuum drying the metal mask that has been washed with the pure water.
1 more element
Dependencies are inferred from the claim text.