Microstructure Inspecting Apparatus and Microstructure Inspecting Method
OwnerMasami Yakabe, Toshiyuki Matsumoto +2inventors
InventorsMasami Yakabe, Toshiyuki Matsumoto, Naoki Ikeuchi, Katsuya Okumura
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Abstract
Voltage is applied to a chip TP by a voltage drive unit 30 through a probe needle P to move a movable part of a microstructure. A sound produced in response to motion of the movable part of the microstructure is detected by a microphone 3. Then, the sound detected by the microphone 3 is measured by a measurement unit 25. The control unit 20 evaluates the characteristics of the tested chip TP by comparing with a sound detected from an ideal chip TP.
Claims14
1-13. (canceled)
A microstructure inspection apparatus for evaluating the characteristics of a microstructure with a movable part in a micro electro mechanical system, comprising:
- electric drive means for providing motion to said movable part of the microstructure;
- and
- characteristic evaluation means for detecting a sound produced by the motion of said movable part of the microstructure provided by said electric drive means and for evaluating the characteristics of said microstructure based on the detection results.
A microstructure inspection method comprising the steps of:
- providing motion to a movable part of a microstructure in a micro electro mechanical system by using electric means;
- detecting a sound produced by the motion of said movable part of the microstructure;
- evaluating the characteristics of said microstructure based on the detection results of said sound.
Dependencies are inferred from the claim text.