Methods and apparatus for substrate edge polishing using a polishing arm

A system adapted to polish an edge of a substrate comprising:

• a housing;
• and
• one or more edge polishing apparatus, wherein the edge polishing apparatus comprises:
• a polishing tape having a polishing surface and a second surface;
• and
• a polishing arm having a longitudinal axis and adapted to force the polishing surface of the polishing tape into contact with an edge of a substrate, the polishing arm including:
• a polishing head adapted to contact the second surface of the polishing tape;
• a rocker arm coupled to the polishing head and adapted to rotate the polishing head around the longitudinal axis of the polishing arm;
• and
• a load arm extending adjacent to the rocker arm and adapted to move the polishing head in a direction substantially perpendicular to the longitudinal axis of the polishing arm.

A method for polishing an edge of a substrate comprising:

• retracting an actuator in a direction substantially perpendicular to the longitudinal axis of a polishing arm, and away from a substrate;
• moving a pivot mechanism in a counter-clockwise direction in response to the retraction of the actuator;
• extending a load arm forward towards the substrate in response to the movement of the pivot mechanism;
• and
• contacting an edge of the substrate with a polishing tape in response to the forward movement of the load arm.