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AssigneeApplied Materials, Inc.
InventorPaul V. Miller
Estimating the term…
Methods, apparatus and systems are provided for processing a selected substrate having an edge profile. The invention includes receiving substrate information at a substrate processing system wherein the substrate information is associated with at least one substrate; determining an identification code of a substrate selected for processing using the received substrate information; accessing edge profile information associated with the selected substrate from the received substrate information using the identification code of the selected substrate; and determining a processing recipe for the selected substrate based on the accessed edge profile information. Numerous other aspects are provided.
A method of processing a substrate comprising:
A method of processing a substrate having an edge profile and an inscribed identification code, the method comprising:
The method of 10 further comprising:
A system for processing a substrate comprising:
The system of 20 wherein the node section information includes information related to the curvature of the node section.
Dependencies are inferred from the claim text.