Single-poly non-volatile memory device and its operation method
AssigneeeMemory Technology Inc.
InventorsChrong-Jung Lin, Hsin-Ming Chen, Shih-Jye Shen, Ya-Chin King, Ching-Hsiang Hsu
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AssigneeeMemory Technology Inc.
InventorsChrong-Jung Lin, Hsin-Ming Chen, Shih-Jye Shen, Ya-Chin King, Ching-Hsiang Hsu
Estimating the term…
A single-poly, P-channel non-volatile memory cell that is fully compatible with nano-scale semiconductor manufacturing process is provided. The single-poly, P-channel non-volatile memory cell includes an N well, a gate formed on the N well, a gate dielectric layer between the gate and the N well, an ONO layer on sidewalls of the gate, a P+ source doping region and a P+ drain doping region. The ONO layer includes a first oxide layer deposited on the sidewalls of the gate and extends to the N well, and a silicon nitride layer formed on the first oxide layer. The silicon nitride layer functions as a charge-trapping layer.
A method for erasing a single-poly, P-channel non-volatile memory unit, wherein the single-poly, P-channel non-volatile memory unit comprises an N well, a P+ source doping region, a P+ drain doping region in the N well, a P channel between the P+ source doping region and P+ drain doping region, the P channel comprising a first channel region and a second channel region that is contiguous to the first channel region and is of the same conductivity type as said first channel region;
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