Back to results
US 2008/0292199 A1Published application
Charged Particle Beam Apparatus
AssigneeHitachi High-Technologies Corporation
InventorsAtsushi Takane, Mitsuji Ikeda, Atsushi Kobaru
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeHitachi High-Technologies Corporation
InventorsAtsushi Takane, Mitsuji Ikeda, Atsushi Kobaru
Estimating the term…
In step 701, the scanning method is determined. In step 702, according to the scanning method determined in step 701, the frequency of an artifact appearing on an image can be determined based on the relation depicted with reference to FIG. 5. In step 703, a frequency domain for removing an artifact is determined from the vertical and horizontal widths determined by such as experimental in advance with respect to the frequency position of step 702. In steps 704 and 705, photography is performed to obtain an image. An image obtained is Fourier transformed in step 706 and the frequency domain determined in step 703 is replaced, for example, by “0.” Its image is subjected to inverse Fourier transformation in step 708, and then displayed and stored in step 709. The flow of such processing enables decreasing an artifact appearing on an image, depending on a scanning method. A frequency domain (vertical and horizontal widths) eliminated in the step 703 and a method for replacement by “0” in the step 707 is determined in advance depending on the kind of inspected samples and a method can be selected depending on the kind of samples.
A charged particle beam apparatus that scans two-dimensionally a sample in a first direction with a charged particle beam so as to display an image of the scanned region with a signal based on a charged particle beam from the sample detected by the scanning, the charged particle beam apparatus employing a partitioning and interlacing method in which a plurality of partitioned regions are defined by partitioning a region to be scanned in a second direction different from the first direction, and scanning in the first direction is performed for every partitioned regions sequentially in a skipping manner,
An image processing method in a charged particle beam apparatus that scans two-dimensionally a sample in a first direction with a charged particle beam so as to display an image of the scanned region with a signal based on a charged particle beam from the sample detected by the scanning, the charged particle beam apparatus employing a partitioning and interlacing method in which scanning in the first direction is performed for partitioned regions sequentially in a skipping manner, the method comprising:
Dependencies are inferred from the claim text.