Probe substrate for test and manufacturing method thereof
AssigneeApex International, Inc.
InventorDal-Lae Rhyu
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Abstract
A probe substrate includes a probe having a plurality of beams and a contactor formed at one end of the beam, and a support substrate for supporting the probe and having a bending space in which the probe moves upwards and downwards. The beam and the contactor are made of the same metal, and the sidewall of the contactor has a staircase configuration. Therefore, the probe substrate and the manufacturing method thereof repeats the lithographic process and the plating process to form the probe having the beam and the contactor combined, thereby increasing the bending degree and structural stability of the probe.
Claims10
A probe substrate comprising:
- a probe having a plurality of beams and a contactor formed at one end of the beam;
- and
- a support substrate supporting the probe and having a bending space, wherein the probe bends upwards and downwards in the bending space;
- wherein the contactor includes a first tip formed on the beam using a first electroplating process and a second tip formed on the first tip using a second electroplating process, and an interface is provided at a space between the first tip and the second tip.
Dependencies are inferred from the claim text.