Semiconductor device and method for manufacturing the same
AssigneeHynix Semiconductor Inc.
InventorSeon Yong Cha
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AssigneeHynix Semiconductor Inc.
InventorSeon Yong Cha
Estimating the term…
A semiconductor device and a method for manufacturing the same are disclosed. The semiconductor device suitable for preventing a threshold voltage of a recess gate from decreasing due to a voltage of an adjacent storage node comprises a semiconductor substrate having an active region which includes a gate area and a storage node contact area and is recess in the gate area; a device isolation structure formed in the semiconductor substrate to define the active region and having a shield layer therein; a recess gate formed in the gate area of the semiconductor substrate; and a storage node formed to be connected with the storage node contact area of the active region.
A semiconductor device suitable for preventing a threshold voltage of a gate from decreasing due to a voltage of an adjacent storage node, the device comprising:
A method for manufacturing a semiconductor device suitable for preventing a threshold voltage of a gate from decreasing due to a voltage of an adjacent storage node, the method comprising:
Dependencies are inferred from the claim text.