Methods and apparatus for efficient operation of an abatement system
AssigneeApplied Materials, Inc.
InventorsDaniel O. Clark, Robbert M. Vermeulen, Youssef A. Loldj, Belynda Flippo, Mehran Moalem, Shaun W. Crawford
Life of this patent
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Abstract
A method of operating an electronic device manufacturing system is provided which includes the steps of receiving information with an interface, wherein the information relates to an abatement system, and shutting down a process tool and an abatement tool in response to the information.
Claims19
A method of operating an electronic device manufacturing system comprising:
- receiving information with an interface, wherein the information relates to an abatement system;
- and
- shutting down a process tool and an abatement tool in response to the information.
The method of claim one wherein the information relates to a fuel flow.
A method of operating an electronic device manufacturing system comprising:
- receiving information with an interface, wherein the information relates to an electronic device process tool;
- and
- placing an abatement tool in an idle mode in response to the information.
An electronic device manufacturing system comprising:
- an electronic device manufacturing process tool;
- an abatement tool adapted to abate effluent from the electronic device manufacturing process tool;
- an abatement resource supply adapted to supply an abatement resource to the abatement tool;
- a sensor adapted to measure at least one of a flow of the abatement resource to the abatement tool and an operating parameter of the abatement tool;
- and
- an interface adapted to receive information from the flow sensor, wherein the information comprises a rate of flow of the abatement resource.
The electronic device manufacturing system of claim further comprising a warning device.
The electronic device manufacturing system of claim wherein the electronic device manufacturing process tool is adapted to be shut down by the interface.
The electronic device manufacturing system of claim wherein the sensor is adapted to measure at least one of temperature, pressure, flame presence, and electrical power within the abatement tool.
The electronic device manufacturing system of claim wherein the sensor is adapted to measure the flow of the abatement resource.
Dependencies are inferred from the claim text.