Substrate Cleaning Apparatus and Method for Determining Timing of Replacement of Cleaning Member

A substrate cleaning apparatus comprising a cleaning member, the cleaning member being adapted to be abutted against a substrate to effect scrub cleaning of the substrate,

• the substrate cleaning apparatus further comprising:
• surface condition detecting means adapted to detect a surface condition of the cleaning member during a substrate cleaning operation or a cleaning-member cleaning operation;
• and
• timing-of-replacement determining means adapted to determine timing of replacement of the cleaning member, based on a change in the surface condition of the cleaning member detected by the surface condition detecting means.

A substrate cleaning apparatus comprising:

• a cleaning member cleaning apparatus including:
• a cleaning member adapted to be abutted against a substrate to effect scrub cleaning of the substrate;
• an abutting member adapted to be pressed against the cleaning member to effect cleaning of the cleaning member;
• drive control means adapted to controllably drive the abutting member;
• and
• a cleaning tank which contains a cleaning liquid and which allows at least a portion of abutment between the cleaning member and the abutting member to be impregnated with the cleaning liquid in the cleaning tank;
• measurement means adapted to measure at least one of the number of particles in the cleaning liquid and a concentration of a component in the cleaning liquid in the cleaning tank;
• and
• a feedback mechanism for feeding back results of measurement by the measurement means to the drive control means.