Process chamber and load-lock split frame construction
OwnerSuhail Anwar, Eric Stegall +3inventors
InventorsSUHAIL ANWAR, Eric Stegall, Robin L. Tiner, Janusz Jozwiak, Philip Vancas
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Abstract
The present invention generally relates to a split frame assembly for supporting a chamber in a processing system. In order to adequately fit into the body of an airplane for transport, the frame may be split into two pieces. Once split, each piece may individually be loaded onto the airplane. The upper piece may comprise all of the various components necessary to operate the chamber including gas panels, control panels, or other panels. The lower piece may support the upper piece.
Claims20
A split frame chamber support, comprising:
- a lower frame having a plurality of first supporting posts;
- one or more aligning mechanisms coupled with one or more first supporting posts;
- one or more first flanges protruding from and coupled with one or more of the first supporting posts;
- and
- an upper frame coupled with the lower frame.
An apparatus, comprising:
- a lower frame having a plurality of first supporting posts;
- one or more aligning mechanisms coupled with one or more first supporting posts;
- one or more first flanges protruding from and coupled with one or more of the first supporting posts;
- an upper frame coupled with the lower frame;
- and
- a chamber coupled with the upper frame.
A split frame support, comprising:
- a lower frame, the lower frame comprising:
- a plurality of first supporting posts extending along parallel center axis;
- one or more first connection rails extending between adjacent first supporting posts, the one or more of the first connection rails detachably coupled with two of the first supporting posts;
- a coupling flange coupled with each first supporting post, the coupling flange extending perpendicular to the center axis;
- and
- one or more alignment mechanisms, the alignment mechanisms coupled to a first supporting post and extending from the first supporting post at an angle relative to the center axis;
- and
- an upper frame coupled to the lower frame, the upper frame comprising:
- a plurality of second supporting posts each extending along separate second center axis equal to a center axis of a corresponding center axis of a first supporting post, at least one second support post has at least three second connection rails coupled thereto with each second connection rail coupled at a different elevation.
Dependencies are inferred from the claim text.