Thin film transistor, method of manufacturing the same, organic light emitting display apparatus comprising the thin film transistor, and method of manufacturing the same

An organic light emitting display apparatus, comprising:

• a thin film transistor, comprising:
• a gate electrode;
• an active layer formed of an oxide and insulated from the gate electrode;
• a source electrode and a drain electrode formed of an oxide on the active layer such that the source electrode and the drain electrode are insulated from the gate electrode and electrically connected to the active layer;
• and
• the active layer, the source, and the drain electrode being formed using an atomic layer deposition (ALD) and an insitu process, and the root mean square (RMS) value of the surface roughness of the active layer which contacts with the source and drain electrodes being less than 1 nm;
• and
• an organic electroluminescence device being electrically connected to the thin film transistor.

A method of manufacturing a thin film transistor, the method comprising:

• forming a gate electrode on a substrate;
• forming an active layer insulated from the gate electrode;
• and
• forming a source electrode and a drain electrode using an oxide on the active layer such that the source electrode and the drain electrode are insulated from the gate electrode and electrically connected to the active layer,
• wherein the active layer, the source electrode, and the drain electrodes are formed using an atomic layer deposition (ALD) and an insitu process.

A method of manufacturing an organic light emitting display apparatus, the method comprising:

• forming a thin film transistor by forming a gate electrode on a substrate;
• forming an active layer insulated from the gate electrode;
• forming a source electrode and a drain electrode using an oxide on the active layer such that the source electrode and the drain electrode are insulated from the gate electrode and electrically connected to the active layer, with the active layer, the source electrode, and the drain electrodes being formed using an atomic layer deposition (ALD) and an insitu process;
• and
• forming an organic electroluminescence device which is electrically connected to the thin film transistor.