Wiring substrate and method of manufacturing the same
AssigneeShinko Electric Industries Co., Ltd.
InventorAkio Horiuchi
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AssigneeShinko Electric Industries Co., Ltd.
InventorAkio Horiuchi
Estimating the term…
In a method of manufacturing a wiring substrate of the present invention, a through-hole plating layer is formed from an inner surface of a through hole in a substrate to both surface sides, then a resin is filled in a through hole, and then a first resist in which an opening portion is provided on the through hole is formed. Then, a partial cover plating layer is formed in the opening portion in the first resist, then the first resist is removed, and then a second resist that covers a whole of the partial cover plating layer and has a pattern for patterning the through-hole plating layer is formed. Then, a pad wiring portion containing the partial cover plating layer and a wiring pattern are obtained by etching the through-hole plating layer while using the second resist as a mask.
A method of manufacturing a wiring substrate, comprising the steps of:
A method of manufacturing a wiring substrate, comprising the steps of:
A wiring substrate, comprising:
Dependencies are inferred from the claim text.