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US 2008/0276706 A1Published application
Rotation Speed Sensor
AssigneeConti Temic microelectronic GmbH
InventorsBernhard Hartmann, Konrad Kasper, Reinhard Gottinger, Stefan Gunthner
Life of this patent
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Abstract
Disclosed is a rotational rate sensor with a substrate, at least one basic element (1) which comprises a frame (2), a suspension (7) of the frame (2) on the substrate, at least one vibration facility (3) and a suspension (4, 5) of the vibration facility (3) on the frame (2), a drive device (8) and a reading facility (9, 10). The drive device (8) is designed in such a manner that it acts on the frame (2) of the basic element (1).
Claims17
1-16. (canceled)
A rotational rate sensor comprising:
- a substrate,
- at least one basic element (1, 11, 12, 13, 14) which comprises a frame (2) and a suspension (7) of the frame (2) on the substrate;
- at least one vibration facility (3) and a suspension (4, 5) of the vibration facility (3) on the frame (2);
- a drive means (8);
- and
- a reading facility (9, 10), wherein the drive means (8) is designed to act on the frame (2) of the basic element (1, 11, 12, 13, 14).
3 more elements
Dependencies are inferred from the claim text.