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US 2008/0259733 A1Published application
Ultrasonic transducer and manufacturing method thereof
AssigneeHitachi, Ltd.
InventorsShuntaro Machida, Hiroyuki Enomoto
Life of this patent
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AssigneeHitachi, Ltd.
InventorsShuntaro Machida, Hiroyuki Enomoto
Estimating the term…
A technology capable of improving receiver sensitivity and improving insulation withstand voltage in an ultrasonic transducer is provided. An ultrasonic transducer comprises: a lower electrode; an insulator covering the lower electrode; a cavity portion disposed on the insulator so as to overlap with the lower electrode; and an upper electrode disposed so as to overlap with the cavity portion. In this ultrasonic transducer, an insulator is inserted between the upper and lower electrodes in a part not having the cavity portion. By this means, sum total of thickness of insulators between the upper and lower electrodes in a part not having the cavity portion is larger than sum total of thickness of insulators between the upper and lower electrodes in a part having the cavity portion.
An ultrasonic transducer, comprising:
An ultrasonic transducer, comprising:
An ultrasonic transducer, comprising:
7-9. (canceled)
Dependencies are inferred from the claim text.