Exposure apparatus and method of manufacturing device
AssigneeCanon Kabushiki Kaisha
InventorsYuji Kojima, Ariyoshi Tsuchiya
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Abstract
This invention discloses an exposure apparatus for exposing a substrate to radiant energy in accordance with a recipe including a plurality of elements, the apparatus comprising: a first storage configured to store the plurality of elements; a first processor configured to change a content of a first element stored in the first storage; and a second processor configured to change a content of a second element stored in the first storage, the second element referring to the first element, in accordance with the change performed for the first element.
Claims7
An exposure apparatus for exposing a substrate to radiant energy in accordance with a recipe including a plurality of elements, the apparatus comprising:
- a first storage configured to store the plurality of elements;
- a first processor configured to change a content of a first element stored in the first storage;
- and
- a second processor configured to change a content of a second element stored in the first storage, the second element referring to the first element, in accordance with the change performed for the first element.
Dependencies are inferred from the claim text.