Electrostatic dissipative stage and effectors for use in forming lcd products
AssigneeSaint-Gobain Ceramics & Plastics, Inc.
InventorsOh-Hun Kwon, Steve D. Hartline, Raymond H. Bryden
Life of this patent
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Abstract
A process for producing a liquid crystal display (LCD) is provided that includes placing a glass substrate on a stage, and subjecting the glass substrate to at least one processing operation of a plurality of processing operations for forming an array of electronic devices on the glass substrate. The stage being electrostatic discharge dissipative and having a surface portion that has a volume resistivity (Rv) within a range between about 1E5 Ωcm and about 1E11 Ωcm.
Claims38
A process for producing a liquid crystal display (LCD) comprising:
- placing a glass substrate on a stage, the stage being electrostatic discharge (ESD) dissipative and having a surface portion that has a volume resistivity (Rv) within a range between about 1E5 Ωcm and about 1E11 Ωcm;
- and
- subjecting the glass substrate to at least one processing operation of a plurality of processing operations for forming an array of electronic devices on the glass substrate.
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A LCD stage comprising:
- a body comprising a surface portion, the surface portion being an electrostatic discharge (ESD) diccipative material having a volume resistivity (Rv) within a range between about 1E5 Ωcm and about 1E11 Ωcm.
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A method of transporting a glass substrate for LCD processing comprising:
- placing a glass substrate on an effector, the effector comprising a body having an arm portions extending from the body, the body having a surface portion being an electrostatic discharge (ESD) dissipative material having a volume resistivity (Rv) within a range between about 1E5 Ωcm and about 1E11 Ωcm;
- and
- transporting the glass substrate from a first position to a second position using the effector.
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Dependencies are inferred from the claim text.