Back to results
US 2008/0259228 A1Published application
Apparatus and a method for illuminating a light-sensitive medium
AssigneeDicon A/S
InventorHenning HENNINGSEN
Life of this patent
Estimating the term…
Abstract
The invention relates to an illumination unit for point illumination of a medium comprising a plurality of light emitters in the form of light guides, which are arranged to illuminate at least one illumination face via a light valve arrangement, said light valve arrangement comprising a plurality of electrically controlled light valves, at least one of the light emitters (1) being arranged to illuminate a plurality of light valves.
Claims18
-22. (canceled)
A maskless lithography system for illumination of a light sensitive medium comprising:
- means for patterning each of a plurality of beams using an illumination unit,
- said means for patterning comprising at least one illumination head and a controller, the illumination head comprising at least two spatial light modulators of individually controllable light valves;
- the illumination head scanning the light sensitive medium in a scanning direction,
- said spatial light modulators including a leading set and a trailing set of spatial light modulators,
- said controller individually controlling the individually controlled light valves of said illumination unit in dependency of the relative movement between the illumination head and the light sensitive medium.
2 more elements
A method for illumination of a light sensitive medium comprising:
- patterning each of a plurality of beams using an illumination unit comprising at least two spatial light modulators of individually controlled light valves, scanning the light sensitive medium in a scanning direction by means of the illumination unit,
- controlling the individually controlled light valves of said illumination unit in dependency of the relative movement between the illumination head and the light sensitive medium resulting from the scanning, and wherein
- the scanning of the light sensitive medium is performed by a at leading and a trailing set of spatial light modulators.
Dependencies are inferred from the claim text.