Microsystem and Method for Positioning a Second Element with Respect to a First Element in a Microsystem
AssigneeInternational Business Machines Corporation
InventorsBernd Gotsmann, Michel Despont, Urs T. Durig
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Abstract
A microsystem, comprising a first static element (1), a second, movable and unattached element (2), an actuator (3) for effecting a force between the first and the second element (1, 2), which actuator (3) is designed for controlling a temperature (T1, T2) of one of the first element (1) and the second element (2). A corresponding method for positioning a second element (2) with respect to a first element (1) in a microsystem is introduced.
Claims49
Microsystem, comprising
- a first static element (1),
- a second, movable and unattached element (2),
- an actuator (3) for effecting a force between the first and the second element (1, 2), which actuator (3) is designed for controlling a temperature (T1, T2) of one of the first element (1) and the second element (2).
Microsystem according to one of the preceding claims, comprising
- a distance (d) between the first element (1) and the second element (2) smaller than 10 in an operation mode in which operation mode the actuator (3) is operated.
Microsystem according to one of the preceding claims,
- wherein surfaces (s1, s2) of the elements (1, 2) facing each other are aligned in parallel.
Microsystem according to any one of the preceding claims,
- one of the first and the second element (1, 2) comprising a first ramp (11) facing the other element (2, 1).
Microsystem according to any one of the preceding claims,
- which actuator (3) is designed for controlling the temperature (T2) of the second element (2) to a temperature above the temperature (T1) of the first element (1).
Microsystem according to any one of the preceding claims,
- which actuator (3) is designed for controlling the temperature (T2) of the second element (2) to a temperature below the temperature (T1) of the first element (1).
Microsystem according to any one of the preceding claims,
- which actuator (3) is designed for controlling the temperature (T1) of the first element (1) to a temperature below the temperature (T2) of the second element (2).
Microsystem according to any one of the preceding claims,
- which actuator (3) is designed for controlling the temperature (T1) of the first element (1) to a temperature above the temperature (T2) of the second element (2).
Microsystem according to any one of the preceding claims,
- which actuator (3) is mounted on the first element (1).
Microsystem according to any one of the preceding claims,
- which actuator (3) is designed for controlling the temperature of a limited zone (tcz) of one of the first and the second element (1, 2).
Micropositioner, comprising
- a microsystem according to any one of the preceding claims for positioning the second element (2) with respect to the first element (1).
Microlifter, comprising
- a microsystem according to any one of the preceding claims for lifting the second element (2) with respect to the first element (1).
Microscanner, comprising
- a microsystem according to any one of the preceding claims for moving the second element (2) with respect to the first element (1) laterally.
Method for positioning a second element with respect to a first element in a microsystem, comprising
- controlling a temperature (T1, T2) of one of the first element (1) and the second element (2) which first element (1) is a static element and which second element (2) is a movable and unattached element, and thereby effecting a force between the first element (1) and the second element (2) for positioning the second element (2) with respect to the first element (1).
Dependencies are inferred from the claim text.