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AssigneesTohoku University, Kumamoto University
InventorsYoshiyuki Taniguchi, Tatsuo Morimoto, Akira Nakada, Masae Nakada, Tadahiro Ohmi
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To provide a data generating method, device, and program that can generate drawing data for drawing the entire general design graphic data with an accuracy of about 1 to 4 nm in a drawing method or a drawing system adapted to draw gradation-controllable spotlights in a two-dimensional array. The data generating method is a method for generating, in an exposure system having a function of irradiating multigradation-controllable spotlights in a two-dimensional array onto a photosensitive film on a substrate, gradation values of the spotlights based on design graphic data. Using reference data classified by features of a graphic and describing in advance combinations of gradation values mapped to coordinate information of a graphic, the method discriminates the feature in the design graphic data near positions of the spotlights and selects the combination of the gradation values in the reference data corresponding to coordinate information of the positions of the spotlights, thereby determining the gradation values.
A method of generating, in an exposure system having a function of irradiating multigradation-controllable spotlights in a two-dimensional array onto a photosensitive film on a substrate, gradation values of said spotlights based on design graphic data, said method comprises the steps of:
A device for generating data, in an exposure system having a function of irradiating multigradation-controllable spotlights in a two-dimensional array onto a photosensitive film on a substrate, gradation values of said spotlights based on design graphic data, said device comprising gradation value determining means for using reference data classified by features of a graphic and describing in advance combinations of gradation values mapped to coordinate information of a graphic, discriminating said feature in said design graphic data near positions of said spots, and selecting the combination of the gradation values in said reference data corresponding to coordinate information of the positions of said spots, thereby determining the gradation values.
A program for generating, in an exposure system having a function of irradiating multigradation-controllable spotlights in a two-dimensional array onto a photosensitive film on a substrate, gradation values of said spotlights based on design graphic data, said program comprising gradation value determining means for using reference data classified by features of a graphic and describing in advance combinations of gradation values mapped to coordinate information of a graphic, discriminating said feature in said design graphic data near positions of said spots, and selecting the combination of the gradation values in said reference data corresponding to coordinate information of the positions of said spots, thereby determining the gradation values.
An exposure system for irradiating multigradation-controllable spotlights in a two-dimensional array onto a photosensitive film on a substrate, said exposure system comprising:
Dependencies are inferred from the claim text.