Accessing data from diverse semiconductor manufacturing applications
OwnerJoel Fenner, Sutirtha Bhattacharya +1inventors
InventorsJoel Fenner, Sutirtha Bhattacharya, Anju Narendra
Life of this patent
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Abstract
Data extraction for semiconductor process analysis may be implemented across multiple databases. A user may select a given level of interest, such as a wafer, a lot, or a die, and may extract specified information across more than one database if desired. The databases may include separate information such as process control information, electrical, and sort test information. Instead of coalescing the databases into one extremely unmanageable database, data can be extracted horizontally across those databases using structured queries.
Claims25
a method comprising:
- extracting information for engineering analysis of a semiconductor processing operation across a plurality of databases.
A computer readable medium storing instructions to cause a processor-based system to:
- extract information for engineering analysis of a semiconductor processing operation across a plurality of databases.
A system comprising:
- a data extraction tool to extract information for engineering analysis of a semiconductor processing operation across a plurality of databases;
- and
- a database adaptor to translate information from different databases to a generic schema.
Dependencies are inferred from the claim text.