Apparatus and method for controlling temperature in a chuck system

Abstract

An apparatus and method of controlling the temperature of a thermal chuck system are disclosed. The system includes a temperature controller which controls a temperature transition in a thermal chuck. The temperature controller comprises inputs that receive air and fluid from an air source and water source, respectively, and an output for alternately transferring the air and fluid in proportions to the thermal chuck. A time proportional controller generates the proportions by computing a proportion band in each of a plurality of control regions. The proportion bands are used by the temperature controller to manage the flow of air and fluid to the chuck such that a minimum undershoot of the temperature transition is realized.

Dependencies are inferred from the claim text.