Methods and Arrangement for Creating Recipes Using Best-Known Methods

An arrangement for affecting a creation of a recipe for processing a substrate in a processing system, comprising:

• a best-know method driven recipe editor, said best-known method driven recipe editor incorporating best-known methods (BKMs), said BKMs being best practice specifications for said recipe;
• a plurality of BKM modules based on said BKMs for said recipe;
• rules for defining parameters in said plurality of BKM modules, said rules being propagated by said BKMs.

An article of manufacture comprising a program storage medium having computer readable code embodied therein, said computer readable code being configured to create a recipe for processing a substrate in a processing system, comprising:

• computer readable code for creating a best-know method driven recipe editor, said best-known method driven recipe editor incorporating best-known methods (BKMs), said BKMs being best practice specifications for said recipe;
• computer readable code for creating a plurality of BKM modules based on said BKMs for said recipe;
• computer readable code for applying rules in defining parameters in said plurality of BKM modules, said rules being propagated by said BKMs.