Metal-polishing composition and chemical mechanical polishing method by using the same
AssigneeFUJIFILM Corporation
InventorsTomoo KATO, Takamitsu Tomiga, Makoto Kikuchi, Sumi Takamiya
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AssigneeFUJIFILM Corporation
InventorsTomoo KATO, Takamitsu Tomiga, Makoto Kikuchi, Sumi Takamiya
Estimating the term…
The present invention provides a metal-polishing composition for use in chemical mechanical polishing of semiconductor devices, comprising: (a) a compound represented by the following Formula A, (b) a compound represented by the following Formula B, (c) an abrasive grain, and (d) an oxidizing agent: in Formula A, R1 represents an alkyl group having 1 to 3 carbon atoms; and R2 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and in Formula B, R3, R4, and R5 each independently represent a hydrogen atom, or an alkyl, aryl, alkoxy, amino, aminoalkyl, hydroxy, hydroxyalkyl, carboxy, carboxyalkyl or carbamoyl group.
A metal-polishing composition for use in chemical mechanical polishing of semiconductor devices, comprising:
A chemical mechanical polishing method of polishing a material to be polished of a semiconductor device with a polishing pad on a polishing surface plate, by contacting and relatively moving the polishing pad and the material to be polished while supplying a metal-polishing composition to the polishing pad,
Dependencies are inferred from the claim text.