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US 2008/0187863 A1Published application
Positive photosensitive composition, polymer compound used for the positive photosensitive composition, production method of the polymer compound, and pattern forming method using the positive photosensitive composition
AssigneeFUJIFILM Corporation
InventorAkinori SHIBUYA
Life of this patent
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Abstract
A polymer compound having a structure represented by the formula (1) as defined herein at a main chain terminal, and a positive photosensitive composition containing a polymer compound having a structure represented by the following formula (1) as defined herein at a main chain terminal and a photoacid generator capable of generating an acid upon irradiation with actinic rays or radiation
Claims7
A positive photosensitive composition comprising:
- a polymer compound having a structure represented by the following formula (1) at a main chain terminal;
- and
- a photoacid generator capable of generating an acid upon irradiation with actinic rays or radiation:
- wherein
- R1 represents a monovalent organic group,
- R2 represents a divalent linking group,
- R3 an R4 each independently represents a hydrogen atom or a monovalent organic group, and
- R3 or R4 may combine with the carbon atom on R1 to form a ring structure.
5 more elements
A polymer compound having a structure represented by the following formula (1) at a main chain terminal:
- wherein
- R1 represents a monovalent organic group,
- R2 represents a divalent linking group,
- R3 an R4 each independently represents a hydrogen atom or a monovalent organic group, and
- R3 or R4 may combine with the carbon atom on R1 to form a ring structure.
2 more elements
A method for producing a polymer compound, comprising:
- polymerizing a polymerizable compound having an ethylenic double bond by using a compound represented by the following formula (2) and a polymerization initiator;
- and reacting the obtained polymer compound with a vinyl ether compound or a halomethyl ether compound:
- HS—R2—OH (2)
- wherein R2 represents a divalent linking group.
1 more element
Dependencies are inferred from the claim text.