Master Substrate and Method of Manufacturing a High-Density Relief Structure
AssigneeKoninklijke Philips Electronics N.V.
InventorErwin Rinaldo Meinders
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Abstract
The present invention relates to a master substrate (10) for optical recording comprising a recording layer (12) and a substrate layer (14), the recording layer comprises a growth dominated phase-change material, the chemical properties with respect to chemical agents of which may be altered due to a phase change induced by projecting light on the recording layer. For tracking purposes, the substrate layer comprises pre-grooves (16). The present invention further relates to a method of manufacturing a stamper for replicating a high-density relief structure.
Claims13
A master substrate (10) for optical recording comprising a recording layer (12) and a substrate layer (14),
- the recording layer comprising a phase-change material, the properties with respect to chemical agents of which may be altered due to a phase change induced by projecting light on the recording layer, and
- the substrate layer comprising a structure (16) for tracking purposes.
A method of manufacturing a stamper for replicating a high-density relief structure comprising the steps of:
- illuminating a master substrate (10) in a conventional optical disc drive by a focused and modulated light beam, the master substrate comprising a recording layer (12) and a substrate layer (14), the recording layer comprising a phase-change material, the properties with respect to chemical agents of which may be altered due to a phase change induced by projecting light on the recording layer, and the substrate layer comprising a structure (16) for tracking purposes,
- treating the previously illuminated master substrate with a solvent, thereby obtaining a relief structure (30),
- depositing a metallic layer on the relief structure,
- growing the deposited layer to a desired thickness, and
- separating the grown layer.
Dependencies are inferred from the claim text.