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US 2008/0187842 A1Published application
Method and System For Wafer Inspection
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChang-Cheng Hung, Tsai-Sheng Gau
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Abstract
A method for inspecting semiconductor wafers patterned by a photomask includes loading a first wafer and scanning a first image of the first wafer, loading a second wafer and scanning a second image of the second wafer, comparing the first and second images, and classifying a difference detected between the first and second images as a potential defect on the photomask. The potential defect includes a haze defect on the photomask.
Claims20
A method for inspecting semiconductor wafers patterned by a photomask, the method comprising:
- loading a first wafer and scanning a first image on the first wafer;
- loading a second wafer and scanning a second image on the second wafer;
- comparing the first and second images;
- and
- classifying a difference detected between the first and second images as a potential defect on the photomask.
2 more elements
An system, comprising:
- a first wafer inspector for generating an image of a first wafer;
- a second wafer inspector for generating an image of a second wafer;
- and
- a comparator coupled to the first wafer inspector and a second wafer inspector via a data bus;
- wherein the comparator is configured and operable to receive the images of the first and second wafer via the data bus, compare the images of the first and second wafer, and classify a difference detected in the image of the second wafer with respect to the image of the first wafer resulting from the comparison.
2 more elements
A method, comprising:
- patterning a first wafer and a second wafer;
- generating an image of the patterned first wafer and an image of the patterned second wafer;
- comparing the images of the first and second wafer;
- and
- classifying a difference detected in the image of the second wafer with respect to the image of the first wafer resulting from the comparing step.
2 more elements
Dependencies are inferred from the claim text.