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US 2008/0187154 A1Published application
MEMS Device with Surface Having a Low Roughness Exponent
AssigneeAnalog Devices, Inc.
InventorJohn R. Martin
Life of this patent
Estimating the term…
Abstract
A MEMS microphone has a backplate and a movable diaphragm that together form a variable capacitance. The backplate has a backplate surface and, in a corresponding manner, the diaphragm has a diaphragm surface that faces the backplate surface. At least one of the backplate surface and the diaphragm surface has at least a portion with a Hurst exponent that is less than or equal to about 0.5.
Claims23
A MEMS microphone comprising:
- a backplate;
- and
- a movable diaphragm forming a variable capacitance with the backplate, the backplate having a backplate surface, the diaphragm having a diaphragm surface, the diaphragm surface facing the backplate surface, at least one of the backplate surface and the diaphragm surface having at least a portion with a Hurst exponent that is less than or equal to about 0.5.
An MEMS device comprising:
- a first surface;
- and
- a second surface adjacent to and spaced from the first surface, the first surface being movable relative to the second surface, at least a portion of the first surface being capable of contacting at least a portion of the second surface, at least one of the first and second surfaces having at least a portion with a Hurst exponent that is less than or equal to about 0.5.
A method comprising:
- providing a MEMS microphone with a backplate and a movable diaphragm that together form a variable capacitance, the backplate having a backplate surface, the diaphragm having a diaphragm surface spaced from the backplate surface, at least one of the backplate surface and the diaphragm surface having a Hurst exponent of less than or equal to about 0.5;
- producing an audible signal that causes the diaphragm to move relative to the backplate;
- and
- forming a water based droplet between the diaphragm surface and the backplate surface.
1 more element
Dependencies are inferred from the claim text.