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US 2008/0187018 A1Published application
Distributed feedback lasers formed via aspect ratio trapping
AssigneeAmberWave Systems Corporation
InventorJizhong Li
Life of this patent
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Abstract
Structures including dielectric diffraction gratings. In some embodiments, laser devices include diffraction gratings defined by openings formed in a dielectric material.
Claims25
A method of making a laser diode, the method comprising the steps of:
- forming a dielectric layer over a top surface of the substrate comprising a first semiconductor material;
- defining a plurality of openings in the dielectric layer, the openings extending to the top surface of the substrate;
- forming a second semiconductor material in the openings;
- and
- defining a plurality of layers over the second semiconductor material and the dielectric layer to form the laser diode,
- wherein portions of the dielectric layer define a diffraction grating.
3 more elements
A semiconductor device comprising:
- a plurality of openings defined in a dielectric layer disposed above a crystalline substrate comprising a first semiconductor material;
- a diffraction grating defined by portions of the dielectric layer disposed between the openings;
- a second crystalline material disposed within each of the openings, the second crystalline material having a lattice mismatch with the substrate, and a majority of defects arising from lattice mismatch between the second material and the substrate exiting at a surface of the second material within each of the openings;
- and
- a plurality of semiconductor layers disposed above the second crystalline material and the diffraction grating, the plurality of semiconductor layers forming a laser diode.
2 more elements
A distributed feedback laser device comprising:
- a dielectric diffraction grating disposed over a crystalline substrate;
- and
- a plurality of layers disposed above the diffraction grating,
- wherein the layers define a laser diode, and at least some of the layers comprise a III-V material lattice-mismatched to the crystalline substrate.
1 more element
A method of making a laser diode, the method comprising the steps of:
- forming a dielectric layer over a crystalline substrate comprising a first semiconductor material;
- forming a first diffraction grating by:
- defining a first plurality of openings in the dielectric layer above a top surface of the crystalline substrate, the first diffraction grating generating a first output wavelength;
- forming a second diffraction grating by:
- defining a second plurality of openings in the dielectric layer above the top surface of the crystalline substrate, the second diffraction grating generating a second output wavelength;
- and
- defining a plurality of layers over the first and second diffraction gratings to form the laser diode.
4 more elements
A distributed feedback laser device comprising:
- a dielectric layer disposed over a crystalline substrate comprising a first semiconductor material;
- a first diffraction grating defined by a first plurality of openings in the dielectric layer above a top surface of the crystalline substrate, the first diffraction grating generating a first output wavelength;
- a second diffraction grating defined by a second plurality of openings in the dielectric layer above the top surface of the crystalline substrate, the second diffraction grating generating a second output wavelength;
- and
- a plurality of layers disposed over the first and second diffraction gratings defining a distributed feedback laser device active region.
2 more elements
Dependencies are inferred from the claim text.