Decoupling Capacitor with Controlled Equivalent Series Resistance

A method of manufacturing, comprising:

• providing a semiconductor chip;
• selecting an equivalent series resistance for a capacitor stack;
• providing a capacitor stack for the semiconductor chip, the capacitor stack including a first group of terminations and a second group of terminations, a first group of electrodes having terminals coupled to the first group of terminations and a second group of electrodes having terminals coupled to the second group of terminations;
• determining a sheet resistance for at least one electrode of the first group of electrodes sufficient to provide the selected equivalent series resistance for the capacitor stack;
• providing the at least one electrode of the first group of electrodes with the sheet resistance sufficient to provide the capacitor stack with the selected equivalent series resistance;
• and
• electrically coupling the capacitor stack to the semiconductor chip.