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US 2008/0186556 A1Published application
Automatic optical inspection using multiple objectives
AssigneeApplied Materials Israel Ltd.
InventorsGilad Almogy, Bryan C. Bolt, Oded Arnon, Boaz Kenan, Ehud Tirosh, Michael Corliss
Life of this patent
Estimating the term…
Abstract
Apparatus and techniques for automated optical inspection (AOI) utilizing image scanning modules with multiple objectives for each camera are provided. A scanning mechanism includes optical components to sequentially steer optical signals from each of the multiple objectives to the corresponding camera.
Claims20
A system for illuminating an article, comprising:
- at least one light source;
- a plurality of objective modules arranged to have fields of view covering a portion of the article;
- and
- a selection mirror mechanism movable to sequentially direct light from the light source to the objective modules such that the fields of view are illuminated.
1 more element
A system for illuminating an article, comprising:
- at least one light source;
- a plurality of objective modules arranged in an arc to have fields of view covering a portion of the article;
- and
- a selection mirror mechanism movable to sequentially direct light from the light source to the objective modules such that the fields of view are illuminated.
1 more element
A method for illuminating an article, comprising:
- bringing at least a portion of the article in fields of view of at least one of a plurality of objective modules;
- and
- adjusting a selection mirror mechanism to sequentially direct light from a light source to the fields of view of the objective modules.
Dependencies are inferred from the claim text.