US 2008/0186476 A1Published application

Inspection apparatus and method, and production method for pattern substrates

AssigneeLasertec Corporation

InventorHaruhiko Kusunose

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Abstract

According to a first aspect of the present invention, there is provided an inspection apparatus including an objective lens, a reflected illumination optical system that illuminates a first area which is part of a field of view of the objective lens, a transmitted illumination optical system that illuminates the first area and a second area; an adjusting unit that adjusts positions on the sample of transmitted illumination light from the transmitted illumination optical system and reflected illumination light from the reflected illumination optical system; a first detector that detects a transmitted light transmitted by the sample and a reflected light reflected by the sample in the first area; and a second detector that detects through the objective lens a transmitted light transmitted by the sample in the second area.

Claims9

Dependent claims

An inspection apparatus which performs inspection using transmitted light transmitted by a sample and reflected light reflected by the sample, comprising:

an objective lens;
a reflected illumination optical system that illuminates a first area which is part of a field of view of the objective lens from the objective lens side of the sample;
a transmitted illumination optical system that illuminates the first area and a second area which is the other part of the field of view of the objective lens than the first area from the opposite side of the sample from the objective lens;
an adjusting unit that adjusts positions on the sample of transmitted illumination light from the transmitted illumination optical system and reflected illumination light from the reflected illumination optical system;
a first detector that detects through the objective lens a transmitted light transmitted by the sample in the first area of the transmitted illumination light from the transmitted illumination optical system and a reflected light reflected by the sample in the first area of the reflected illumination light from the reflected illumination optical system;
and
a second detector that detects through the objective lens a transmitted light transmitted by the sample in the second area of the transmitted illumination light from the transmitted illumination optical system.

4 more elements

An inspection method which performs inspection by detecting through an objective lens transmitted light transmitted by a sample and reflected light reflected by the sample, comprising the steps of:

illuminating the sample with reflected illumination light from the objective lens side of the sample to illuminate a first area which is part of a field of view of the objective lens;
illuminating the sample with transmitted illumination light from the opposite side of the sample from the objective lens to illuminate the first area and a second area which is the other part of the field of view of the objective lens than the first area;
making reflected light reflected by the sample which is part of the reflected illumination light and transmitted light transmitted by the sample which is part of the transmitted illumination light incident on the objective lens, while changing positions on the sample of the transmitted illumination light and the reflected illumination light;
detecting through the objective lens the transmitted light and the reflected light from the first area, which is part of the field of view of the objective lens;
and
detecting through the objective lens the transmitted light from the second area, which is the other part of the field of view of the objective lens than the first area.

3 more elements

Dependencies are inferred from the claim text.