Optical imaging device

An optical imaging device comprising

• at least one optical element;
• a first part of said optical element contacting a first atmosphere and a second part of said optical element at least temporarily contacting a second atmosphere, wherein
• a reduction device is provided, said reduction device at least reducing dynamic fluctuations in the pressure difference between said first atmosphere and said second atmosphere.

An optical imaging method, wherein

• a projection pattern is imaged onto a substrate using an optical imaging device;
• a first part of an optical element of said optical imaging device contacting a first atmosphere and a second part of said optical element at least temporarily contacting a second atmosphere;
• for reducing an imaging error occurring during imaging said projection pattern onto said substrate and resulting from dynamic fluctuations in the pressure difference between said first atmosphere and said second atmosphere, at least a reduction of said dynamic fluctuations in said pressure difference between said first atmosphere and said second atmosphere being provided.