Low frequency process-variation-insensitive termperature-stable micromechanical resonators

Micromechanical resonator apparatus, comprising:

• a semiconductor-on-insulator substrate;
• and
• resonator apparatus comprising:
• one or more anchors connected to the semiconductor-on-insulator substrate;
• at least one excitation/sense port that is electrically insulated from the semiconductor-on-insulator substrate;
• a resonator comprising
• one or more flexural members connected to the one or more anchors that are separated from the semiconductor-on-insulator substrate and separated from the at least one excitation/sense port by one or more gaps;
• a mass coupled to one or more of the flexural members that is separated from the semiconductor-on-insulator substrate and which comprises a grid.

Micromechanical resonator apparatus, comprising:

• a substrate;
• and
• resonator apparatus comprising:
• one or more anchors connected to the substrate;
• at least one excitation/sense port that is electrically insulated from the substrate;
• at least one tuning port that is electrically insulated from the substrate;
• and
• a resonator comprising:
• one or more flexural members connected to the one or more anchors that are separated from the substrate and separated from the at least one excitation/sense port by one or more gaps and separated from the at least one tuning port by one or more gaps;
• and
• a mass coupled to one or more of the flexural members that is separated from the substrate and which comprises a grid.