Electrical test probe and method for manufacturing the same
AssigneeKabushiki Kaisha Nihon Micronics
InventorsHideki HIRAKAWA, Yuko YAMADA, Yosuke YOSHIZAWA, Takayuki HAYASHIZAKI, Akira SOMA, Shinji KUNIYOSHI
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AssigneeKabushiki Kaisha Nihon Micronics
InventorsHideki HIRAKAWA, Yuko YAMADA, Yosuke YOSHIZAWA, Takayuki HAYASHIZAKI, Akira SOMA, Shinji KUNIYOSHI
Estimating the term…
A probe tip section of an electrical test probe has a laminated structure consisting of a first deposition portion and a second deposition portion covering the first deposition portion, and by the laminated structure, a maximum cross-sectional area portion at which the cross-sectional area of the probe tip section is increased to a base portion is provided between a tip end of the probe tip section and the base portion in the probe tip section. At the maximum cross-sectional area portion, a dimension in the X direction as seen on a flat surface perpendicular to a protruding direction of the probe tip section is increased in a one-dimensional way, and in addition, a dimension in the Y direction perpendicular to the X direction is increased from the tip end toward the base portion, as a result of which the cross-sectional area of the probe tip section can be increased in a two-dimensional way. Thus, the cross-sectional area at the maximum cross-sectional area portion reaching the base portion of the probe tip section can be made to be larger than in the conventional case, and along with the increase of the cross-sectional area, the stress acting on the base portion can be lowered.
An electrical test probe comprising:
A method for manufacturing a probe comprising a probe tip section and a probe main body section having a pedestal portion on which said probe tip section is formed to be protruded, said method comprising the step of:
Dependencies are inferred from the claim text.