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US 2008/0185952 A1Published application
Apparatus for Producing Secondary Electrons, a Secondary Electrode, and an Acceleration Electrode
AssigneeInfineon Technologies AG
InventorAndreas Kyek
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Abstract
An apparatus includes a primary electrode and an acceleration electrode. The acceleration electrode or, alternatively, an additional secondary electrode contains a slot that extends obliquely through the acceleration electrode or through the secondary electrode. This measure allows secondary electrons to be produced in a highly effective manner.
Claims31
An apparatus for producing secondary electrons, comprising:
- at least one primary electrode for producing primary electrons;
- an acceleration electrode for accelerating the primary electrons;
- a secondary electrode for producing secondary electrons when the accelerated primary electrons arrive;
- and
- there being a potential of 0 V on the secondary electrode and on the acceleration electrode.
2 more elements
Dependencies are inferred from the claim text.