Sensor semiconductor package and fabrication
AssigneeSiliconware Precision Inductries Co., Ltd.
InventorsChien-Ping Huang, Cheng-Yi Chang, Chang-Yueh Chan
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AssigneeSiliconware Precision Inductries Co., Ltd.
InventorsChien-Ping Huang, Cheng-Yi Chang, Chang-Yueh Chan
Estimating the term…
A sensor semiconductor package and a fabrication method thereof are provided in the present application. The fabrication method comprises steps of: forming a plurality of grooves on a wafer between bond pads on active surfaces of every adjacent chips; forming metal layers in the grooves for electrically connecting with the bond pads of adjacent chips; thinning the non-active surfaces to expose the metal layers therefrom; forming a cover layer on the non-active surfaces with the metal layers are exposed therefrom; forming a solder resist layer on the covering layer and the conductive wirings with terminals of the conductive wirings are exposed therefrom; and cutting along cutting paths between every sensor chips to form a plurality of sensor semiconductor packages. Accordingly, the prior art problems such as misalignment of forming beveled grooves, concentrated stress and breakage can be solved.
A fabrication method of sensor semiconductor packages, comprising:
A sensor semiconductor package, comprising:
Dependencies are inferred from the claim text.