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US 2008/0185518 A1Published application
High performance micro-fabricated electrostatic quadrupole lens
AssigneeMicrosaic Systems Limited
InventorRichard Syms
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AssigneeMicrosaic Systems Limited
InventorRichard Syms
Estimating the term…
A method of aligning sets of cylindrical electrodes in the geometry of a miniature quadrupole electrostatic lens, which can act as a mass filter in a quadrupole mass spectrometer is provided. The electrodes are mounted in pairs on microfabricated supports, which are formed from conducting parts on an insulating substrate. Complete segmentation of the conducting parts provides low capacitative coupling between co-planar cylindrical electrodes, and allows incorporation of a Brubaker prefilter to improve sensitivity at a given mass resolution. A complete quadrupole is constructed from two such supports, which are spaced apart by further conducting spacers. The spacers are continued around the electrodes to provide a conducting screen.
An electrostatic quadrupole lens comprising first and second microfabricated mounts, each mount having an insulating substrate having formed thereon first and second mounting members configured to receive a first and second electrode respectively, the first and second mounting members being physically distinct from one another.
A quadrupole mass spectrometer comprising a lens formed from first and second microfabricated mounts, each mount having an insulating substrate having formed thereon first and second mounting members configured to receive a first and second electrode respectively, the first and second mounting members being physically distinct from one another.
A microfabricated quadrupole lens comprising a first set of electrodes provided in a quadrupole configuration and a second set of electrodes provided in a quadrupole configuration the first and second set of electrodes being arranged serially such that the first set provides a pre-filter to the second set, each of the electrodes being coupled to a mounting member that is provided on an insulating substrate and is physically isolated from the mounting member of others of the electrodes.
Dependencies are inferred from the claim text.