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AssigneeMecal Applied Mechanics B.V.
InventorsAnton Herrius De Roest, Marco Jan Antoni Freriksen
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The invention relates to a support construction (1) for fabrication equipment of microscopic structures, comprising a monolithic foundation body (3) on which, for fixing the fabrication equipment, a fixing element (6) is provided comprising a resilient element. The fixing element further comprises a rigid element (10) whose rigidity decreases significantly when applying a dynamic force to the fixing element which force exceeds a predetermined threshold value. The support construction is further designed such that, regardless of the size of the dynamic force applied to the fixing element, a static force applied to the fixing element is substantially transmitted via the resilient element to the foundation body.
A support construction for fabrication equipment of microscopic structures, comprising a monolithic foundation body, on which, for fixing the fabrication equipment, a fixing element is provided which comprises a rigid element, the fixing element further comprising a resilient element whose rigidity decreases significantly when applying a dynamic force to the fixing element which force exceeds a predetermined threshold value, the support construction being further designed such that, regardless of the magnitude of a dynamic force applied to the fixing element, a static force applied to the fixing element is transmitted substantially via the resilient element to the foundation body.
A support construction according to any one of the preceding claims, wherein the rigid element is designed to be frangible.
A support construction according to any one of the preceding claims, wherein the rigid element and the resilient element are integrated.
Dependencies are inferred from the claim text.