Mounting device
AssigneeTokyo Electron Limited
InventorsKazuya YANO, Hiroshi Shimoyama, Masaru Suzuki
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AssigneeTokyo Electron Limited
InventorsKazuya YANO, Hiroshi Shimoyama, Masaru Suzuki
Estimating the term…
A mounting device includes a vertically movable mounting table for mounting thereon a target object and a rotational driving mechanism for rotating the mounting table within a predetermined angle. The mounting table is vertically raised and rotated by the rotational driving mechanism. The rotational driving mechanism includes a driving shaft extending in a tangential direction of the mounting table and a moving body moving in the tangential direction via the driving shaft. A first cam follower is attached in perpendicular to the moving body and a second cam follower is extending horizontally from an outer circumferential surface of the mounting table so as to be in contact with the first cam follower. Also, a resilient member connecting the mounting table and the moving body brings the first cam follower and the second cam follower into elastic contact with each other.
A mounting device comprising:
Dependencies are inferred from the claim text.