Probe tip cleaning apparatus and method of use
AssigneeInternational Business Machines Corporation
InventorRonald A. Feroli
Life of this patent
Estimating the term…
Abstract
Apparatus for the method, including cartridges for housing strips of cleaning pad material, are provided. A method for cleaning probe tips, e.g., on a probe card, comprises abrading the probe tips on an abrasive surface, and advancing the abrasive surface so that a later cleaning cycle uses a clean portion of the cleaning pad. The method may include use of a vacuum to aspirate material dislodged by the abrading. In another aspect, a method for cleaning probe tips includes brushing the probe tips and operating a vacuum to aspirate material from the probe tips and/or brush. The methods may be used singly or in combination.
Claims20
A cartridge comprising a cleaning pad, a cleaning pad supply portion, and a cleaning pad take-up portion, the cartridge being designed and configured to fit into a cleaning portion of a wafer prober.
A probe cleaning apparatus comprising:
- a cleaning pad supply portion and a cleaning pad take-up portion;
- a cleaning pad wound at least on the cleaning pad supply portion and dispensed in the cleaning pad take-up portion during use;
- a scrubber vacuum positioned and arranged to aspirate material dislodged by the cleaning pad;
- and
- a backing surface having at least a portion adjacent to the cleaning pad.
A method of cleaning a probe tip comprising contacting a probe tip with a surface of a cleaning pad, abrading the probe tip with the cleaning pad, and advancing the cleaning pad in a direction parallel to the surface of the cleaning pad.
Dependencies are inferred from the claim text.