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US 2008/0176172 A1Published application
Development processing device
AssigneeTokyo Electron Limited
InventorsHideo Funakoshi, Masahito Hamada, Yoshiki Okamoto
Life of this patent
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Abstract
A device includes a rotary base; an approach stage; a substrate holding table and a nozzle head. The substrate holding table holds the work by suction, and comes into intimate contact with the approach stage and the rotary base through first and second annular seal members to form a liquid storage space, respectively. When the suction holding and the intimate contact are released, the substrate becomes rotatable together with the rotary base and the approach stage.
Claims20
A development processing device comprising:
- a rotary base rotatably holding a work substrate;
- an outer peripheral plate arranged for rotation together with said rotary base and surrounding an outer periphery of said work substrate held by said rotary base;
- a substrate holding table arranged vertically movably with respect to said rotary base for holding said work substrate by suction;
- and
- a nozzle head arranged movably along a surface of said work substrate held by said substrate holding table for simultaneously performing supply and aspiration of a liquid developer with respect to the work substrate, wherein
- a top surface of said outer peripheral plate is flush with or slightly higher in level than a top surface of said work substrate,
- when said substrate holding table is holding said work substrate by suction, said substrate holding table is in intimate contact with said outer peripheral plate and said rotary base with a seal member interposed therebetween such that a liquid storage space is formed for forming a liquid film continuously extending over the top surface of said outer peripheral plate and the top surface of said work substrate, and
- when said suction holding and said intimate contact are released, said work substrate is rotatable together with said rotary base and said outer peripheral plate.
5 more elements
Dependencies are inferred from the claim text.